Kipande cha SiC cha kiwango cha uzalishaji cha inchi 8 cha 4H-N SiC
Jedwali lifuatalo linaonyesha vipimo vya wafer zetu za SiC za inchi 8:
| Vipimo vya DSP vya SiC ya aina ya N ya inchi 8 | |||||
| Nambari | Bidhaa | Kitengo | Uzalishaji | Utafiti | Mjinga |
| 1: vigezo | |||||
| 1.1 | aina ya poli | -- | 4H | 4H | 4H |
| 1.2 | mwelekeo wa uso | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2: Kigezo cha umeme | |||||
| 2.1 | dopanti | -- | Nitrojeni ya aina ya n | Nitrojeni ya aina ya n | Nitrojeni ya aina ya n |
| 2.2 | upinzani | ohm ·cm | 0.015~0.025 | 0.01~0.03 | NA |
| 3: Kigezo cha mitambo | |||||
| 3.1 | kipenyo | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | unene | μm | 500±25 | 500±25 | 500±25 |
| 3.3 | Mwelekeo wa notch | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
| 3.4 | Kina cha Notch | mm | 1~1.5 | 1~1.5 | 1~1.5 |
| 3.5 | LTV | μm | ≤5 (10mm * 10mm) | ≤5 (10mm * 10mm) | ≤10(10mm*10mm) |
| 3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Upinde | μm | -25~25 | -45~45 | -65~65 |
| 3.8 | Mkunjo | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4: Muundo | |||||
| 4.1 | msongamano wa bomba ndogo | ea/cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | maudhui ya chuma | atomi/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ea/cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | ea/cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | ea/cm2 | ≤7000 | ≤10000 | NA |
| 5. Ubora wa mbele | |||||
| 5.1 | mbele | -- | Si | Si | Si |
| 5.2 | umaliziaji wa uso | -- | CMP ya uso wa Si | CMP ya uso wa Si | CMP ya uso wa Si |
| 5.3 | chembe | ea/kaki | ≤100 (saizi≥0.3μm) | NA | NA |
| 5.4 | mkwaruzo | ea/kaki | ≤5, Urefu wa Jumla ≤200mm | NA | NA |
| 5.5 | Ukingo chipsi/vidonda/nyufa/madoa/uchafuzi | -- | Hakuna | Hakuna | NA |
| 5.6 | Maeneo ya aina nyingi | -- | Hakuna | Eneo ≤10% | Eneo ≤30% |
| 5.7 | alama ya mbele | -- | Hakuna | Hakuna | Hakuna |
| 6: Ubora wa nyuma | |||||
| 6.1 | kumaliza nyuma | -- | Mbunge wa uso wa C | Mbunge wa uso wa C | Mbunge wa uso wa C |
| 6.2 | mkwaruzo | mm | NA | NA | NA |
| 6.3 | Kasoro za nyuma ukingo chipsi/vidonda | -- | Hakuna | Hakuna | NA |
| 6.4 | Ugumu wa mgongo | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Kuashiria nyuma | -- | Notch | Notch | Notch |
| 7: ukingo | |||||
| 7.1 | ukingo | -- | Chamfer | Chamfer | Chamfer |
| 8: Kifurushi | |||||
| 8.1 | kifungashio | -- | Tayari kwa kutumia ombwe kifungashio | Tayari kwa kutumia ombwe kifungashio | Tayari kwa kutumia ombwe kifungashio |
| 8.2 | kifungashio | -- | Kafe nyingi kifungashio cha kaseti | Kafe nyingi kifungashio cha kaseti | Kafe nyingi kifungashio cha kaseti |
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